Patent Assignment
Reel/Frame 035194/0278
Assignment of Assignor's Interest
Recorded: 2015-03-18
Pages: 3
Assignors
YAMAZAKI, SHUNPEI
Executed: 2015-03-03
JINTYOU, MASAMI
Executed: 2015-03-04
SHIMA, YUKINORI
Executed: 2015-03-04
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device Comprising Adding Oxygen to Buffer Film and Insulating Film