Assignment of Assignor's Interest

Recorded: 2015-03-19 Pages: 4

Assignors

MIZUNO, HIDEKI

Executed: 2015-02-16

YAMAZAKI, KUMIKO

Executed: 2015-02-16

Assignee

TOKYO ELECTRON LIMITED

3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Plasma Etching Method and Plasma Etching Apparatus

Patent: 9,530,666 →

Application: 14/428,817 →

Publication: US 2015/0235861