Patent Assignment
Reel/Frame 035214/0932
Assignment of Assignor's Interest
Recorded: 2015-03-20
Pages: 3
Assignor
YAMAMOTO, TAKASHI
Executed: 2015-03-16
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device