Patent Assignment
Reel/Frame 035228/0876
Assignment of Assignor's Interest
Recorded: 2015-03-23
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method for Correcting Positional Displacement, and Storage Medium