Patent Assignment
Reel/Frame 035242/0037
Assignment of Assignor's Interest
Recorded: 2015-03-24
Pages: 2
Assignors
OHNISHI, RYUJI
Executed: 2015-03-05
SAKAMOTO, RIKIMARU
Executed: 2015-03-05
HO, BANGCHING
Executed: 2015-03-05
Assignee
NISSAN CHEMICAL INDUSTRIES, LTD.
7-1, KANDA-NISHIKI-CHO 3-CHOME, CHIYODA-KU, TOKYO, 1010054, JAPAN
Covered Property
(1)
Resist Overlayer Film Forming Composition for Lithography and Method for Manufacturing Semiconductor Device Using the Same