Patent Assignment
Reel/Frame 035242/0685
Assignment of Assignor's Interest
Recorded: 2015-03-24
Pages: 5
Assignors
DOBASHI, KAZUYA
Executed: 2015-03-09
INAI, KENSUKE
Executed: 2015-03-09
SAITO, MISAKO
Executed: 2015-03-09
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Cleaning Method, Substrate Cleaning Apparatus and Vacuum Processing System