Patent Assignment
Reel/Frame 035252/0255
Assignment of Assignor's Interest
Recorded: 2015-03-25
Pages: 4
Assignors
FRESE, RALF
Executed: 2014-10-16
SAMANIEGO, MICHAEL
Executed: 2014-10-13
DEGUENTHER, MARKUS
Executed: 2014-11-05
HAIDNER, HELMUT
Executed: 2014-10-14
HOCH, RAINER
Executed: 2014-10-17
SCHRIEVER, MARTIN
Executed: 2014-10-15
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Measuring System for Measuring an Imaging Quality of an EUV Lens