Patent Assignment
Reel/Frame 035270/0146
Assignment of Assignor's Interest
Recorded: 2015-03-27
Pages: 2
Assignors
BLEIDISTEL, SASCHA
Executed: 2014-08-21
HARTJES, JOACHIM
Executed: 2014-08-26
GRUNER, TORALF
Executed: 2014-09-03
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Exposure Apparatus Comprising a Measuring System for Measuring an Optical Element