Patent Assignment
Reel/Frame 035272/0055
Assignment of Assignor's Interest
Recorded: 2015-03-27
Pages: 7
Assignors
MOROI, MASAYUKI
Executed: 2015-03-23
YAMANAKA, HAJIME
Executed: 2015-03-16
AIBA, YASUSHI
Executed: 2015-03-18
HOTTA, TAKANOBU
Executed: 2015-03-16
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Gas Supply Mechanism, Gas Supplying Method, Film Forming Apparatus and Film Forming Method Using the Same