Patent Assignment
Reel/Frame 035286/0318
Assignment of Assignor's Interest
Recorded: 2015-03-30
Pages: 3
Assignor
TAKEDA, TSUYOSHI
Executed: 2015-03-24
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Using Hydrocarbon and Halogen-Based Precursors, Substrate Processing Apparatus for Processing Same, and Recording Medium Comprising Hydrocarbon and Halogen-Based Precursors
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.