Patent Assignment
Reel/Frame 035292/0377
Assignment of Assignor's Interest
Recorded: 2015-03-30
Pages: 6
Assignors
QIAN, JUN
Executed: 2015-03-13
KANG, HU
Executed: 2015-03-12
LAVOIE, ADRIEN
Executed: 2015-03-13
MATSUYAMA, SEIJI
Executed: 2015-03-23
KUMAR, PURUSHOTTAM
Executed: 2015-03-19
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Ultrathin Atomic Layer Deposition Film Accuracy Thickness Control