Patent Assignment
Reel/Frame 035301/0236
Assignment of Assignor's Interest
Recorded: 2015-03-31
Pages: 4
Assignors
MATHIJSSEN, SIMON GIJSBERT JOSEPHUS
Executed: 2012-09-10
DEN BOEF, ARIE JEFFREY
Executed: 2012-09-13
TINNEMANS, PATRICIUS ALOYSIUS JACOBUS
Executed: 2012-09-10
BOGAART, ERIK WILLEM
Executed: 2012-09-10
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Measuring Asymmetry of a Microstructure, Position Measuring Method, Position Measuring Apparatus, Lithographic Apparatus and Device Manufacturing Method