Patent Assignment
Reel/Frame 035330/0317
Assignment of Assignor's Interest
Recorded: 2015-04-03
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Gas Reaction Trajectory Control Through Tunable Plasma Dissociation for Wafer by-Product Distribution and Etch Feature Profile Uniformity
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.