Patent Assignment
Reel/Frame 035332/0252
Assignment of Assignor's Interest
Recorded: 2015-04-03
Pages: 8
Assignors
NGUYEN, ANDREW
Executed: 2015-03-12
SARODE VISHWANATH, YOGANANDA
Executed: 2015-03-23
CHO, TOM K.
Executed: 2015-03-11
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Symmetric Chamber Body Design Architecture to Address Variable Process Volume with Improved Flow Uniformity/Gas Conductance