Patent Assignment
Reel/Frame 035346/0054
Assignment of Assignor's Interest
Recorded: 2015-04-07
Pages: 4
Assignors
IWAO, TOSHIHIKO
Executed: 2015-02-16
HIRANO, TAKAHIRO
Executed: 2015-02-16
ISHIBASHI, KIYOTAKA
Executed: 2015-02-16
KAWAKAMI, SATORU
Executed: 2015-02-16
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus