Patent Assignment
Reel/Frame 035349/0798
Assignment of Assignor's Interest
Recorded: 2015-04-07
Pages: 4
Assignors
SAIDO, SHUHEI
Executed: 2015-01-22
WADA, YUICHI
Executed: 2015-01-22
SASAKI, TAKAFUMI
Executed: 2015-01-22
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method for Manufacturing Semiconductor Device and Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.