Patent Assignment
Reel/Frame 035359/0805
Assignment of Assignor's Interest
Recorded: 2015-04-08
Pages: 3
Assignors
SRINIVASAN, SWAMINATHAN T.
Executed: 2015-03-26
KHAJA, FAREEN ADENI
Executed: 2015-03-26
SANCHEZ, ERROL ANTONIO C.
Executed: 2015-04-07
MARTIN, PATRICK M.
Executed: 2015-03-27
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Utilization of Angled Trench for Effective Aspect Ratio Trapping of Defects in Strain-Relaxed Heteroepitaxy of Semiconductor Films