Patent Assignment
Reel/Frame 035360/0403
Assignment of Assignor's Interest
Recorded: 2015-04-08
Pages: 4
Assignors
COLLINS, KENNETH S.
Executed: 2015-03-31
RAMASWAMY, KARTIK
Executed: 2015-03-26
CARDUCCI, JAMES D.
Executed: 2015-03-27
RAUF, SHAHID
Executed: 2015-03-27
DORF, LEONID
Executed: 2015-03-29
YANG, YANG
Executed: 2015-03-27
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Ion-Ion Plasma Atomic Layer Etch Process and Reactor