Patent Assignment
Reel/Frame 035371/0589
Assignment of Assignor's Interest
Recorded: 2015-04-09
Pages: 2
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
NO.8, LI-HSIN ROAD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method and System for Cleansing Wafer in Cmp Process of Semiconductor Manufacturing Fabrication