Patent Assignment
Reel/Frame 035373/0546
Assignment of Assignor's Interest
Recorded: 2015-04-09
Pages: 4
Assignors
CHAN, BOON TEIK
Executed: 2015-02-25
SAYAN, SAFAK
Executed: 2015-03-10
KIM, MIN-SOO
Executed: 2015-02-25
PARNELL, DONI
Executed: 2015-03-02
GRONHEID, ROEL
Executed: 2015-03-09
Assignee
IMEC VZW
KAPELDREEF 75, LEUVEN, 3001, BELGIUM
Covered Property
(1)
Method for Producing Fin Structures of a Semiconductor Device in a Substrate