Patent Assignment
Reel/Frame 035385/0762
Assignment of Assignor's Interest
Recorded: 2015-04-10
Pages: 4
Assignors
ZHU, HELEN H.
Executed: 2015-04-08
MARQUEZ, LINDA
Executed: 2015-04-08
YAQOOB, FAISAL
Executed: 2015-04-08
PARK, PILYEON
Executed: 2015-04-08
BERRY, IVAN L., III
Executed: 2015-04-08
ANGELOV, IVELIN A.
Executed: 2015-04-09
PARK, JOON HONG
Executed: 2015-04-09
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method for Achieving Ultra-High Selectivity While Etching Silicon Nitride