Patent Assignment
Reel/Frame 035385/0766
Assignment of Assignor's Interest
Recorded: 2015-04-10
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Eliminating First Wafer Metal Contamination Effect in High Density Plasma Chemical Vapor Deposition Systems