Patent Assignment
Reel/Frame 035392/0730
Assignment of Assignor's Interest
Recorded: 2015-04-13
Pages: 2
Assignors
YAMAMOTO, TAKUMA
Executed: 2015-03-17
FUNAKOSHI, TOMOHIRO
Executed: 2015-03-17
TANIMOTO, KENJI
Executed: 2015-03-17
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Charged Particle Beam Device and Overlay Misalignment Measurement Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.