Patent Assignment
Reel/Frame 035403/0537
Assignment of Assignor's Interest
Recorded: 2015-04-14
Pages: 8
Assignors
YOSHIDA, HIROSHI
Executed: 2015-03-30
FUKUSHIMA, MAKOTO
Executed: 2015-03-30
YASUDA, HOZUMI
Executed: 2015-03-30
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Polishing Apparatus and Polishing Method