Patent Assignment
Reel/Frame 035408/0511
Assignment of Assignor's Interest
Recorded: 2015-04-14
Pages: 3
Assignors
VARADARAJAN, BHADRI N.
Executed: 2015-02-25
GONG, BO
Executed: 2015-03-03
GUI, ZHE
Executed: 2015-03-12
Assignee
NOVELLUS SYSTEMS, INC.
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Conformal Deposition of Silicon Carbide Films