Patent Assignment
Reel/Frame 035428/0176
Assignment of Assignor's Interest
Recorded: 2015-04-16
Pages: 5
Assignors
YOKOYAMA, TOSHIO
Executed: 2014-12-24
SEKIMOTO, MASAHIKO
Executed: 2014-12-24
KOBAYASHI, KENICHI
Executed: 2014-12-24
AKAZAWA, KENICHI
Executed: 2014-12-24
MITSUYA, TAKASHI
Executed: 2014-12-24
KURASHINA, KEIICHI
Executed: 2014-12-24
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Transferring a Substrate