Patent Assignment
Reel/Frame 035431/0830
Assignment of Assignor's Interest
Recorded: 2015-04-17
Pages: 2
Assignors
IWANAGA, SHUJI
Executed: 2015-04-14
NISHIYAMA, TADASHI
Executed: 2015-04-14
KATOU, KANZOU
Executed: 2015-04-14
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Thickness Measurement Apparatus, Film Thickness Measurement Method, and Non-Transitory Computer Storage Medium