Patent Assignment
Reel/Frame 035475/0345
Change of Name
Recorded: 2015-04-21
Pages: 8
Assignor
ZAO NIKON CO., LTD.
Executed: 2010-12-28
Assignee
MIYAGI NIKON PRECISION CO., LTD.
20, AZA-SHIN'OYOKE, MIYA, ZAO-MACHI, KATTA-GUN, MIYAGI-KEN, JAPAN
Covered Property
(1)
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method