Patent Assignment
Reel/Frame 035482/0210
Assignment of Assignor's Interest
Recorded: 2015-04-23
Pages: 5
Assignors
CHIU, WEI-CHAO
Executed: 2013-05-09
CHENG, NIAN-FUH
Executed: 2013-05-09
CHEN, CHEN-YU
Executed: 2013-05-13
SHIEH, MING-FENG
Executed: 2013-05-09
LAI, CHIH-MING
Executed: 2013-05-09
HUANG, WEN-CHUN
Executed: 2013-05-09
LIU, RU-GUN
Executed: 2013-05-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method of Patterning Features of a Semiconductor Device