Patent Assignment
Reel/Frame 035483/0963
Assignment of Assignor's Interest
Recorded: 2015-04-23
Pages: 3
Assignors
YANG, TUNG-LIN
Executed: 2015-03-31
CHANG, CHUN-HUNG
Executed: 2015-03-31
WANG, ROUH JIER
Executed: 2015-03-31
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
System of Exhuast and Operation Method Thereof