Patent Assignment
Reel/Frame 035513/0460
Assignment of Assignor's Interest
Recorded: 2015-04-28
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Technique to Deposit Sidewall Passivation for High Aspect Ratio Cylinder Etch