Patent Assignment
Reel/Frame 035515/0759
Assignment of Assignor's Interest
Recorded: 2015-04-28
Pages: 6
Assignors
SAGEHASHI, MASAYOSHI
Executed: 2015-04-10
FUJIWARA, TAKAYUKI
Executed: 2015-04-10
HASEGAWA, KOJI
Executed: 2015-04-10
TANIGUCHI, RYOSUKE
Executed: 2015-04-10
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Monomer, Polymer, Resist Composition, and Patterning Process