Patent Assignment
Reel/Frame 035523/0935
Assignment of Assignor's Interest
Recorded: 2015-04-29
Pages: 7
Assignors
TSENG, YUAN-TAI
Executed: 2015-04-09
WU, CHANG-MING
Executed: 2015-04-09
LIU, SHIH-CHANG
Executed: 2015-04-10
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Structure and Method to Reduce Polysilicon Loss from Flash Memory Devices During Replacement Gate (RPG) Process in Integrated Circuits