Patent Assignment
Reel/Frame 035526/0572
Assignment of Assignor's Interest
Recorded: 2015-04-29
Pages: 11
Assignors
TATENO, HIDETO
Executed: 2015-01-21
WADA, YUICHI
Executed: 2015-01-21
ASHIHARA, HIROSHI
Executed: 2015-01-21
YAMAZAKI, KEISHIN
Executed: 2015-01-21
USHIDA, TAKUROU
Executed: 2015-02-02
NAKAMURA, IWAO
Executed: 2015-02-05
IZUMI, MANABU
Executed: 2015-01-21
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method for Manufacturing Semiconductor Device, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.