Patent Assignment
Reel/Frame 035529/0077
Assignment of Assignor's Interest
Recorded: 2015-04-29
Pages: 5
Assignors
OHNO, MASAKATSU
Executed: 2015-04-15
IDOJIRI, SATORU
Executed: 2015-04-15
KIKUCHI, KANPEI
Executed: 2015-04-15
HIRAKATA, YOSHIHARU
Executed: 2015-04-21
YOKOYAMA, KOHEI
Executed: 2015-04-21
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Substrate Separation Apparatus for Stacked Body