Patent Assignment
Reel/Frame 035541/0754
Assignment of Assignor's Interest
Recorded: 2015-04-30
Pages: 5
Assignors
DANEK, MICHAL
Executed: 2015-03-31
HENRI, JON
Executed: 2015-03-30
TANG, SHANE
Executed: 2015-03-31
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Deposition of Conformal Films by Atomic Layer Deposition and Atomic Layer Etch