Patent Assignment
Reel/Frame 035582/0294
Assignment of Assignor's Interest
Recorded: 2015-05-07
Pages: 6
Assignors
YAN, HAOQUAN
Executed: 2015-02-23
O'NEILL, ROBERT GRIFFITH
Executed: 2015-05-05
CASAES, RAPHAEL
Executed: 2015-05-04
MCCHESNEY, JON
Executed: 2015-02-23
PATERSON, ALEX
Executed: 2015-02-23
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Moveable Edge Coupling Ring for Edge Process Control During Semiconductor Wafer Processing