Patent Assignment
Reel/Frame 035591/0781
Assignment of Assignor's Interest
Recorded: 2015-05-08
Pages: 3
Assignors
ASAI, MASAYUKI
Executed: 2015-04-06
HONDA, KOICHI
Executed: 2015-04-03
UMEMOTO, MAMORU
Executed: 2015-04-06
OKUDA, KAZUYUKI
Executed: 2015-04-03
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Semiconductor Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.