Patent Assignment
Reel/Frame 035614/0073
Assignment of Assignor's Interest
Recorded: 2015-05-07
Pages: 25
Assignors
TANG, WEI
Executed: 2015-02-13
VAN SCHRAVENDIJK, BART
Executed: 2015-02-17
QIAN, JUN
Executed: 2015-02-20
KANG, HU
Executed: 2015-02-17
LAVOIE, ADRIEN
Executed: 2015-02-20
PADHI, DEENESH
Executed: 2012-04-10
SMITH, DAVID C.
Executed: 2015-02-17
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Inhibitor Plasma Mediated Atomic Layer Deposition for Seamless Feature Fill