Patent Assignment
Reel/Frame 035641/0477
Assignment of Assignor's Interest
Recorded: 2015-05-14
Pages: 3
Assignor
ISHIBASHI, TOMOATSU
Executed: 2015-04-14
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Drying Apparatus, Storage Medium, and Substrate Drying Method