Patent Assignment
Reel/Frame 035670/0709
Assignment of Assignor's Interest
Recorded: 2015-05-19
Pages: 8
Assignors
SHIOKAWA, YOICHI
Executed: 2015-04-14
YAGI, KEITA
Executed: 2015-04-14
KOBAYASHI, YOICHI
Executed: 2015-04-14
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Polishing Device and Polishing Method