Assignment of Assignor's Interest

Recorded: 2015-05-20 Pages: 3

Assignors

SAPIENS, NOAM

Executed: 2015-05-13

SHCHEGROV, ANDREI V.

Executed: 2015-05-13

PANDEV, STILIAN IVANOV

Executed: 2015-05-13

Assignee

KLA-TENCOR CORPORATION

ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035

Covered Properties (2)

Apparatus, Techniques, and Target Designs for Measuring Semiconductor Parameters

Patent: 9,784,690 →

Application: 14/708,058 →

Publication: US 2015/0323471

Apparatus and Target Design for Measuring a Characteristics of a Substrate Using a Combined Method

Application: 61/991,857 →