Patent Assignment
Reel/Frame 035693/0750
Assignment of Assignor's Interest
Recorded: 2015-05-21
Pages: 5
Assignors
CARCASI, MICHAEL ANDREW
Executed: 2015-05-15
PRINTZ, WALLACE PAUL
Executed: 2015-05-15
HOOGE, JOSHUA STEVEN
Executed: 2015-05-15
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107, JAPAN
Covered Property
(1)
Method and Apparatus for Increased Recirculation and Filtration in a Photoresist Dispense System Using a Liquid Empty Reservoir