Patent Assignment
Reel/Frame 035712/0257
Assignment of Assignor's Interest
Recorded: 2015-05-26
Pages: 4
Assignor
PARKHE, VIJAY D.
Executed: 2015-05-20
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Detachable High-Temperature Electrostatic Chuck Assembly