Patent Assignment
Reel/Frame 035719/0796
Assignment of Assignor's Interest
Recorded: 2015-05-27
Pages: 7
Assignors
MIYASHITA, TETSUYA
Executed: 2015-04-15
HARA, MASAMICHI
Executed: 2015-04-15
SUZUKI, NAOYUKI
Executed: 2015-04-15
YAMAMOTO, KAORU
Executed: 2015-04-16
MAEDA, KOUJI
Executed: 2015-04-16
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Cooling Processing Apparatus and Method for Operating the Same