Patent Assignment
Reel/Frame 035773/0077
Assignment of Assignor's Interest
Recorded: 2015-06-03
Pages: 3
Assignors
NAIK, MEHUL B.
Executed: 2015-05-15
MA, PAUL F.
Executed: 2015-05-26
HA, TAE HONG
Executed: 2015-05-26
GUGGILLA, SRINIVAS
Executed: 2015-05-26
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method and Apparatus for Protecting Metal Interconnect from Halogen Based Precursors