Patent Assignment
Reel/Frame 035775/0210
Assignment of Assignor's Interest
Recorded: 2015-06-03
Pages: 6
Assignors
KIM, JI-MYUNG
Executed: 2015-04-29
JEONG, GYU-MIN
Executed: 2015-04-28
JEONG, TAE-HWA
Executed: 2015-04-28
YOON, KWANG-SUB
Executed: 2015-04-28
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 443-742, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Target for in-Situ Lithography Metrology, Metrology Method for in-Situ Lithography, and Method of Manufacturing Integrated Circuit Device by Using in-Situ Metrology