Patent Assignment
Reel/Frame 035783/0744
Assignment of Assignor's Interest
Recorded: 2015-06-04
Pages: 4
Assignors
WANG, HUI
Executed: 2015-05-11
CHEN, FUPING
Executed: 2015-05-11
XIE, LIANGZHI
Executed: 2015-05-11
JIA, SHENA
Executed: 2015-05-11
WANG, XI
Executed: 2015-05-11
ZHANG, XIAOYAN
Executed: 2015-05-11
Assignee
ACM RESEARCH (SHANGHAI) INC.
BUILDING 4, NO. 1690, CAI LUN ROAD, ZHANGJIANG HIGH-TECH PARK, PUDONG DISTRICT, SHANGHAI, 201203, CHINA
Covered Property
(1)
Method and Apparatus for Cleaning Semiconductor Wafer