Patent Assignment
Reel/Frame 035784/0254
Assignment of Assignor's Interest
Recorded: 2015-06-04
Pages: 3
Assignor
TAKAHASHI, SYUICHI
Executed: 2015-06-02
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Cleaning Method