Patent Assignment
Reel/Frame 035786/0181
Assignment of Assignor's Interest
Recorded: 2015-06-04
Pages: 3
Assignor
KITAGAWA, DAI
Executed: 2015-05-19
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Placing Table and Plasma Processing Apparatus
Application:
14/730,520 →
Publication:
US 2015/0373783